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发明名称
WORK WASHING AND BURR-ELIMINATING EQUIPMENT
摘要
申请公布号
JPH01251650(A)
申请公布日期
1989.10.06
申请号
JP19880076155
申请日期
1988.03.31
申请人
SHIBAURA ENG WORKS CO LTD
发明人
MIURA AKIRA
分类号
B08B3/02;H01L21/56;H01L23/50
主分类号
B08B3/02
代理机构
代理人
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