| 摘要 |
1282516 Measuring surface roughness PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 19 Sept 1969 [24 Sept 1968] 46235/69 Heading G1A In an apparatus for measuring the roughness of a surface 1 light from a source 12 is directed via a condensing lens 13, a beam-splitting mirror 14 and a lens 2 on to the surface 1 and two images of the surface, having a periodic phase difference and a variable lateral displacement with respect to one another, formed by means of a further beam splitting mirror 5 and two mirrors 6 and 7, as shown, are superimposed on a detector 9. The periodic phase difference between the images is due to the mirror 6 oscillating in the direction indicated in Fig.2. The detector 9 provides an alternating signal output and its amplitude is varied as the mirror 7 is rotated to provide the variable lateral displacement. A measurement of the roughness of the surface can then be derived from the maximum and minimum values of the amplitude of the alternating signal output. A mathematical analysis is disclosed. |
