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发明名称
WAFER TRANSFERRING METHOD
摘要
申请公布号
JPH01251633(A)
申请公布日期
1989.10.06
申请号
JP19880308577
申请日期
1988.12.06
申请人
TEL SAGAMI LTD
发明人
NISHI HIRONOBU
分类号
H01L21/677;B65G25/00;B65G47/80;B65G47/90;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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