| 摘要 |
PURPOSE:To lower a temperature of an object to be treated, by providing a layer for transmitting ultraviolet rays and shielding heat rays between an ultraviolet light source and the object to be treated. CONSTITUTION:A vessel 4 having a thin space layer 30 is formed of synthetic quartz plates with thickness of 1-1.5mm which can transmit ultraviolet rays of 200nm or less. Thus, the vessel 4 allows ultraviolet rays to reach an object to be treated 5. Since the vessel 4 is formed of quartz that transmits infrared rays having a wavelength up to 4mum, the vessel transmits heat radiation rays from the heated walls of an ultraviolet radiation supply 2. Therefore, a temperature of the object 5 is raised to 150-200 deg.C by heat radiation even after stopping supply of power to a heater 7 of a stage 6. In order to treat the object 5 at a low temperature, pure water which transmits ultraviolet rays and absorbs heat rays with wavelength of 1-1.5mum or over is supplied through the thin space layer 30 defined by the vessel 4, so that the temperature of the object 5 can be lowered to 100 deg.C or less. |
