| 摘要 |
PURPOSE:To detect a fine defect of a transparent body and to eliminate the need for complicate preprocessing such as specular surface finishing before inspection by scanning laser light and transmitting the light through the whole transparent body to be inspected. CONSTITUTION:A laser generating device 20 generates the laser light to be projected on the transparent body 50 to be inspected. Then a laser beam scanning means 30 scans the transparent body 50 with the laser beam 21 projected by the laser generating device 20. Then a slit means 40 stops down the beam sectional shape of the laser beam 21 projected on the transparent body 50 into a shape corresponding to an inspected area of the transparent body 50. Further, a transparent body holding means 60 which has a transparent body holding part for holding the transparent body 50 has a window part there the laser beam 21 to be projected on the transparent body 50 is passed and a scattered light observation window part for observing scattered light from the defect of the transparent body 50 and is so formed as to contain liquid having nearly the same refractive index with the transparent body 50 so that the transparent body 50 is embedded. Consequently, the fine defect of the transparent body can be detected. |
