APPARATUS FOR DETECTING MEMBRANE PATTERN

摘要

PURPOSE:To detect a membrane pattern with good contrast, by changing the wavelength band of the reflected light or transmitted light received and detected from the surface of a specimen. CONSTITUTION:When a specimen S formed based on a membrane pattern is irradiated with the light L from a light source 10, a plurality of band-pass filters are changed over in a wavelength band converting part 12. An operator confirms the contrast of the observed image of each band-pass filter through an imaging part 16 to select a band-pass filter capable of obtaining the sharpest image and the membrane pattern can be detected with good contrast.