发明名称 REFRIGERANT SUPPLY DEVICE
摘要 <p>PURPOSE:To supply a refrigerant to a cryostat without using any liquid feed pump by reservoiring the refrigerant in a detachable cartridge, and coupling this cartridge and the cryostat by a liquid tube and a return gas tube. CONSTITUTION:When the cartridge 2 which contains the refrigerant 1 is fitted to a cartridge mount part 13, the refrigerant 1 vaporizes by the entry of heat from the cartridge mount part 13 in a room temperature state and the refrigerant 1 is supplied by its pressure to the cryostat 21 where a squid sensor 20 is mounted. The refrigerant 1 which reaches the cryostat 21 vaporizes by the entry of external heat and its gas is fed back to the position of the upper lid 5 of the cartridge 2 through a return gas tube 17. Then, the upper lid 5 is heated by this gas to accelerate the vaporization of the refrigerant 1 in the cartridge 2, thereby supplying a fresh refrigerant to the cryostat 21. Thus, the refrigerant is supplied from the cartridge to the cryostat by an amount corresponding to a heat load.</p>
申请公布号 JPH01250081(A) 申请公布日期 1989.10.05
申请号 JP19880077378 申请日期 1988.03.30
申请人 SHIMADZU CORP 发明人 SAITO HIDEFUMI
分类号 H01L39/04;G01R33/035;G01V3/40 主分类号 H01L39/04
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