发明名称 MEASUREMENT OF ELECTRICAL SIGNALS WITH SUBPICOSECOND RESOLUTION
摘要 Electrical signals are measured (analyzed and displayed) with subpicosecond resolution by electro-optic sampling of the signal in an electro-optic crystal, the index of which changes in response to the electric field produced by the signal, in accordance with the Pockels effect. The crystal is disposed adjacent to a transmission line along which the signals propagate the line may be a coplanar wave guide having a plurality of parallel strips of conductive material on the surface of the crystal. The crystal may be disposed adjacent to and in the fringe field of a line on a substrate, which may be part of an integrated circuit, for measuring signals propagating along the line during the operation of the circuit. A beam of short optical (laser) sampling pulses in the picosecond range is focused so that the region where the beam is confocal is disposed where the field is parallel in the crystal. The confocal region (where the optical wavefront is planar is preferrably close to the surface of the crystal and perpendicular to the optical axis of the crystal. The optical pulses transmitted through the crystal are processed to provide a display affording a measurement of the electrical signal.
申请公布号 DE3572735(D1) 申请公布日期 1989.10.05
申请号 DE19853572735 申请日期 1985.03.26
申请人 THE UNIVERSITY OF ROCHESTER 发明人 MOUROU, GERARD;MEYER, KEVIN E.
分类号 G01R19/00;G01R1/07;G01R13/34;G01R29/02;G01R31/302;G02F1/03;H01L21/66;(IPC1-7):G01R29/02 主分类号 G01R19/00
代理机构 代理人
主权项
地址