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发明名称
LOW-TEMPERATURE DRY ETCHING DEVICE
摘要
申请公布号
JPH01248521(A)
申请公布日期
1989.10.04
申请号
JP19880074340
申请日期
1988.03.30
申请人
HITACHI LTD;HITACHI TECHNO ENG CO LTD
发明人
KIKKAI MOTOHIKO;SHIROO KAZUHIRO;FUJII TAKASHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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