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经营范围
发明名称
EXTERNAL PLASMA GUN
摘要
申请公布号
EP0197668(B1)
申请公布日期
1989.10.04
申请号
EP19860301753
申请日期
1986.03.11
申请人
DENTON VACUUM INC
发明人
LEE, KON JIUN;MUSSET, ANTHONY;DENTON, RICHARD A.
分类号
H01J37/32;(IPC1-7):H01J37/32;H05H1/24
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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