SEMICONDUCTOR INTEGRATED CIRCUIT INSPECTING DEVICE,申请号JP19880079426-传众专利搜索

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发明名称	SEMICONDUCTOR INTEGRATED CIRCUIT INSPECTING DEVICE
摘要
申请公布号	JPH01248633(A)	申请公布日期	1989.10.04
申请号	JP19880079426	申请日期	1988.03.30
申请人	NEC CORP	发明人	OKAZAKI SHOHEI
分类号	G01R31/26;G01R1/06;G01R31/28;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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