| 摘要 |
PURPOSE:To carry out bonding of a carrier tape without sticking of foreign matter to a bonding tool by providing an intermediate member between the bonding tool and the carrier tape. CONSTITUTION:When the carrier tape 1 is sent and a lead 2 is positioned and a bump 8 of a pellet 9 to be bonded is interfaced with the lead 2, a vacuum adsorption base 6 rises and the bump 8 abuts on the lead 2. The bonding tool 3 is then moved and lowered in the XY directions and the lead 2 is pressed on the bump 8 via the intermediate member 5 to carry out bonding. By this method, the bonding without sticking of the foreign matter to the bonding tool can be carried out. |
