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发明名称
INSPECTION APPARATUS
摘要
申请公布号
EP0263618(A3)
申请公布日期
1989.10.04
申请号
EP19870308419
申请日期
1987.09.23
申请人
EMHART INDUSTRIES, INC.
发明人
SHAY, TIMOTHY W.
分类号
G01N21/90;(IPC1-7):G01N21/90
主分类号
G01N21/90
代理机构
代理人
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地址
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