| 摘要 |
<p>PURPOSE:To permit stable formation of a chip into a desired shape, by sensing opportunely variations in electropolishing circumstances and making computation for the maintenance of an optimum electropolishing condition. CONSTITUTION:When a chip 1 reaches the liquid surface of electrolyte 2 with a downward movement of an ascending and descending head 61, a signal by the resultant contact current is fed into the input port of a CPU to alloy setting of the chip 1 in the position of the origin on its feed amount. This is intended for keeping electropolishing conditions within a fixed state by sensing the liquid level being changed with the passage of time originating from evaporating electrolyte. And the electropolishing procedures is carried out under the electropolishing condition given after compensating of conditional numerical values in terms of a program or data by further reading a preset electropolishing condition data in, immersing the chip 1 in a given position under the liquid surface of electrolyte, impressing a current- detecting voltage, performing the A/D conversion of a sensed current (I1) and a sensed current (I2) after an elapse of a specified time, entering the conversion results into the input port of said CPU which computes a value of a change in a current with the passage of time and preselects the compensation data for an electropolishing condition to define offsetting of the electropolishing condition. Whereby the chip of a desired shape can be obtained.</p> |
