摘要 |
PURPOSE:To obtain a dence superconductor having high adhesion to a substrate and high superconducting characteristic, etc., by forming liquid drops of a starting material prepd. by irradiating with laser beams while feeding a metallic starting material to a nozzle section of a thermal spraying cylinder, ejecting the liquid drops onto the substrate with carrier gas and forming a film of a precursor of the superconductor, and heat-treating the formed film. CONSTITUTION:A thermal spraying cylinder 2 is constructed by forming a nozzle section 3 at an end and a condenser lens 4 for laser beam an another end. A feeding port 7 of protective gas for the lens is formed on a side wall of the thermal spraying cylinder 2, and a hood 8 for feeding carrier gas is provided to the periphery of the nozzle section 3. Liquid drops of the starting material are formed by irradiating a metallic starting material while feeding the material to the nozzle section 3 from a feeding device 5 of the metallic starting material installed to an end of the nozzle section 3. At the same time, the liquid drops of the starting material are ejected onto the substrate 9 with the carrier gas from the feeding hood 8. To obtain a compound body 11 by forming film of a precursor 10 of the superconductor. The superconductor is obtd. by heat-treating the compound body 11, thereafter. |