| 发明名称 |
Cryogenic process for metal lift-off |
| 摘要 |
This invention is directed to a process for the cryogenic lift-off of metal/resist material from a surface of a substrate.
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| 申请公布号 |
US4871651(A) |
申请公布日期 |
1989.10.03 |
| 申请号 |
US19880211648 |
申请日期 |
1988.06.27 |
| 申请人 |
FORD MOTOR COPMPANY |
发明人 |
MCCUNE, JR., ROBERT C.;TOTH, LOUIS;BAILEY, ROBERT S. |
| 分类号 |
G03F7/26;G03F7/40;G03F7/42;H01L21/027;H01L21/3205;H05K3/14 |
主分类号 |
G03F7/26 |
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