| 摘要 |
PURPOSE:To prevent a pattern from being distorted owing to the resticking of unnecessary chromium by using and leaving a negative resist at pinhole parts, and dissolving unnecessary chromium with a chromium etchant finally. CONSTITUTION:A chromium film 3 is formed by sputtering over the entire surface of a molybdenum film 2 on a glass substrate 1 which have pinholes 5. Then the negative resist 4 is applied and heat-treated, and the pinhole parts are exposed through a spot microscope and developed. At this stage, the resist is peeled off except at the pinhole parts and the chromium film 3 is exposed. Then the whole body is immersed in the chromium etchant to dissolve out the unnecessary chromium film except at the pinhole parts with the etchant. The resist left at the pinhole parts is peeled off by dry etching finally. Thus, the resist does not stick again when the pinholes are corrected. |
