| 摘要 |
PURPOSE:To accurately form a film of a multicomponent substance having a stable compsn. by beam sputtering by using a target composed of target sections of different substances serially arranged around the central axis in the direction of rotation. CONSTITUTION:A discoid target 2 used for beam sputtering is composed of target sections 2A, 2B, 2C of different each sectorial formed substances serially arranged around the central axis. The target 2 is placed in a vacuum chamber 1, rotated in the direction of an arrow and irradiated with laser light 6 emitted from an optical system to successively sputter the target sections 2A, 2B, 2C to form a film on a substrate 3. A film of a multicomponent substance having a stable compsn. is accurately and rapidly formed on a substrate 3. |
