| 摘要 |
In one embodiment, the container/dispenser for an ultra high purity chemical includes a thin walled inner container made of TEFLON polymer. The thin walled inner container is closed at the top by an inner container lid. An outer container surrounds the inner container and comprises a metal outer wall that is interiorly covered or lined with TEFLON polymer or other polymeric material. The outer container is closed at the top by an outer container lid. The inner container is separated from the outer container by a spacer assembly that spaces the side and bottom walls of the inner thin walled container away from the inteiror surface of the outer container. An inert gas is disposed in the interspace between the inner and outer container and a set of valves are mounted on the inner and outer container lids. One valve allows an inert gas to be bubbled through the ultra high purity chemical while another valve dispenses the "bubbled" chemical. Third and fourth valves permit injection and extraction of the inert gas from the interspace between the inner and outer containers. The method of storing and dispensing includes the steps of containing the ultra high purity chemical in a thin walled TEFLON polymer inner container, surrounding the entirety of the inner container with an inert gas, providing an outer container and enclosing the inner gas and the surrounding inert gas with the outer container.
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