摘要 |
PURPOSE:To improve the durability of magnetic particles by coating magnetic cores with Al2O3, ZrO, Si3N4 or SiC while vibrating the cores. CONSTITUTION:Coating layers of one or more among Al2O3, ZrO, Si3N4 and SiC are formed on magnetic cores of Fe, an Fe alloy, etc., by plasma CVD while vibrating the cores. The pref. frequency of the vibration is about 50-200Hz and the pref. amplitude is about 0.2-0.5mm. The coating layers having superior wear, shock and oxidation resistances can be uniformly formed on the entire surfaces of the magnetic cores. The resulting magnetic particles are used for an electromagnetic coupler such as an electromagnetic clutch. |