BOAT USED FOR MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19880072609-传众专利搜索

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发明名称	BOAT USED FOR MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH01244613(A)	申请公布日期	1989.09.29
申请号	JP19880072609	申请日期	1988.03.25
申请人	MITSUBISHI ELECTRIC CORP	发明人	KANEOKA TATSUNORI
分类号	H01L21/31;H01L21/22	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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