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发明名称
METHOD OF CLEANING SURFACE OF SILICON SINGLE CRYSTAL SUBSTRATE
摘要
申请公布号
JPH01244621(A)
申请公布日期
1989.09.29
申请号
JP19880071302
申请日期
1988.03.25
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
ITO TAIZO;YASUTOMI KEIZO;ABE TAKAO
分类号
H01L21/304;H01L21/322
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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