| 摘要 |
PURPOSE:To compose a character, a figure without using a scanning mechanism by providing a movable hollow anode provided in a vacuum vessel, a pair of counter cathodes provided at both sides of the anode, and a transmission part provided at one of the cathodes. CONSTITUTION:After a vacuum vessel 1 is evacuated by a vacuum evacuator, argon gas is introduced from an inert gas supply unit into the vessel 1. When a positive potential is applied to an anode 4 from a DC high voltage power source, a cold cathode discharge is generated between the anode 4 and the counter cathodes 5, 6. Positive ions of the argon gas generated by the cold cathode discharge are impinged to the surfaces of the cathodes 5, 6; gold atoms, sputtered from the cathodes 5, 6, are partly transmitted through slits 7a to adhere to the surface of a glass board 8, thereby forming a gold thin film 9. Neutral particles generated by the cold cathode discharge are transmitted through the slit 7a to impinge and erode the surface of the board 8. Then, an eroded part 10 is formed on a region W. When a pattern mask 25 is provided between the transmitted part 17 and a hard material 18, it can be inlaid in an arbitrary shape. |
