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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01245519(A)
申请公布日期
1989.09.29
申请号
JP19880073565
申请日期
1988.03.28
申请人
SEIKO EPSON CORP
发明人
KATOU JIYURI
分类号
H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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