MANUFACTURE OF OXIDE FILM,申请号JP19880072442-传众专利搜索

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发明名称	MANUFACTURE OF OXIDE FILM
摘要
申请公布号	JPH01244623(A)	申请公布日期	1989.09.29
申请号	JP19880072442	申请日期	1988.03.25
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	ITO YUKO;KOSEKI HIDEO;KAWAMURA TOSHIO;TSUKIKAWA YASUHIKO
分类号	H01L21/316;C23C16/04;C23C16/44;C23C16/455;C23C16/48	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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