摘要 |
1287789 Crystal-pulling. KOKUSAI DENKI KK 28 Nov 1969 [6 Dec 1968] 48212/69 Heading BIS [Also in Division G3] A silicon rod 20 is pulled from a melt contained in a rotating quartz crucible 3b and heated by a cylindrical resistance heater 4 supplied with an amount of power dependent on a signal from a temperature-sensing thermocouple 5 maintained substantially at the level of the solid/liquid interface, so as to maintain substantially constant the temperature of said interface. The heater and thermocouple may be moved down at a constant (e.g. 0.1 mm/min) or variable rate determined by calculation or practical test. Pulling may be effected in an atmosphere of argon. |