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发明名称
MANUFACTURE OF SEMICONDUCTOR CRYSTAL AND TWO BEAM ARRAY SEMICONDUCTOR LASER DEVICE
摘要
申请公布号
JPH01243490(A)
申请公布日期
1989.09.28
申请号
JP19880069425
申请日期
1988.03.25
申请人
HITACHI LTD
发明人
TANAKA TOSHIAKI;KONDO MASAHIKO;MINAGAWA SHIGEKAZU;KAJIMURA TAKASHI
分类号
H01L21/205;H01S5/00
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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