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发明名称
COMPOUND SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH01243411(A)
申请公布日期
1989.09.28
申请号
JP19880072801
申请日期
1988.03.24
申请人
SHARP CORP
发明人
SHIMIZU MASABUMI
分类号
H01L21/20;H01S5/00
主分类号
H01L21/20
代理机构
代理人
主权项
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