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发明名称
WIRING OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH01243540(A)
申请公布日期
1989.09.28
申请号
JP19880069638
申请日期
1988.03.25
申请人
TOSHIBA CORP
发明人
MINAMI FUMIHIRO
分类号
H01L21/82;G06F17/50
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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