| 摘要 |
PURPOSE:To obtain a highly reliable stamper, by recording a guide groove or data on the surface of the stamper and radially providing a large number of streaks to the rear thereof from the center of the stamper to the peripheral edge thereof. CONSTITUTION:A vacuum chuck is operated to fix a stamper 1, to which protective coating is applied, to a stamper fixing table 21 and the fixing table 21 is rotated at a constant speed and air is, injected in a ribbon pressing part 23 under pressure. Said air is blown out from blow holes 25 to form an extremely thin air layer between a ribbon pressing part 23 and a polishing ribbon 29. Next, a pulley 27 is rotated to feed the polishing ribbon 29 and the ribbon pressing part 23 is allowed to fall to polish the stamper in such a state that the polishing surface of the polishing ribbon 29 is brought into contact with the rear of the stamper 1 to form radial streaks 3 to the stamper 1 over the whole surface thereof. By this method, the concentric circular streaks formed to the stamper at a manufacturing time are eliminated and the highly reliable stamper is formed. |
