| 摘要 |
PURPOSE:To effectively utilize a getter pump and to simplify the exhaust system of an equipment by sticking a getter material such as titanium on the inside wall surface of a liquid nitrogen shroud provided to the periphery of a test space and surrounding the periphery of the space with a vacuum pump. CONSTITUTION:A valve 2 is made to an opened state and a sample is fitted to a sample manipulator 4 and a vacuum vessel is exhausted to a supervacuum region with a vacuum pump 3. Then the sample manipulator 4 is evacuated to the outside of a shroud 6 and a shutter 7 is closed and thereafter a titanium getter pump 9 is moved to the inside of the shroud 6. when the titanium getter pump 9 is electrified and heated via an electrode 13, activated titanium atoms are stuck on the inner surface of the shroud 6. Since a titanium thin film stuck thereon has adsorbing action even for hydrogen being residual gas in supervacuum, the pressure in the vacuum vessel 1 is furthermore lowered and prescribed operation is performed by removing the sample manipulator 4 again to the inside of the shroud 6. |
