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发明名称
PRODUCTION OF THIN COMPOUND FILM CONSISTING OF GROUP II AND GROUP VI
摘要
申请公布号
JPH01242497(A)
申请公布日期
1989.09.27
申请号
JP19880070595
申请日期
1988.03.23
申请人
NEC CORP
发明人
ISHIKO MASAYASU
分类号
C30B29/48
主分类号
C30B29/48
代理机构
代理人
主权项
地址
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