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发明名称
VAPOR DEPOSITION MATERIAL
摘要
申请公布号
JPH01242771(A)
申请公布日期
1989.09.27
申请号
JP19880068838
申请日期
1988.03.23
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
NEHASHI KIYOSHI;OKABE SHUICHI
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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