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发明名称
CHARGED PARTICLE APPARATUS
摘要
申请公布号
GB2215907(A)
申请公布日期
1989.09.27
申请号
GB19880015359
申请日期
1988.06.28
申请人
* JEOL LIMITED
发明人
RYUZO * AIHARA;HARUO * KASAHARA
分类号
H01J37/04;H01J37/09
主分类号
H01J37/04
代理机构
代理人
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地址
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