发明名称 PRODUCTION OF OPTICAL SWITCH AND MODULATOR
摘要 PURPOSE:To enable always stable operation without generating a malfunction by forming LiNbO3 to the state projecting from the surface of two proximate light guides in the region between said light guides. CONSTITUTION:The pattern of titanium 5 corresponding to the pattern of a desired optical directional coupler 2 is first formed on an LiNbO3 substrate 1. The Ti 5 is then thermally diffused by a high-temp. treatment into the LiNbO3 substrate 1 to form the optical directional coupler 2. A metal or dielectric or the like as a mask material 6 is then deposited to the region of the LiNbO3 substrate 1 where the projecting part 3 of the LiNbO3 is to be formed. The part of the LiNbO3 substrate 1 in the region where the projecting part 3 of the LiNbO3 is to be formed is etched. Finally, electrodes 4 are installed on the optical directional coupler 2. The always stable operation is thereby obtd. without generating the malfunction.
申请公布号 JPH01243018(A) 申请公布日期 1989.09.27
申请号 JP19880071379 申请日期 1988.03.24
申请人 NEC CORP 发明人 NISHIMOTO YUTAKA
分类号 G02B6/12;G02B6/13;G02F1/03;G02F1/035;G02F1/313 主分类号 G02B6/12
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