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发明名称
MICROSCOPE ARRANGED FOR MEASURING MICROSCOPIC STRUCTURES
摘要
申请公布号
GB2215837(A)
申请公布日期
1989.09.27
申请号
GB19890002542
申请日期
1989.02.06
申请人
* CARL-ZEISS-STIFTUNG,7920 HEIDENHEIM
发明人
RALF * SAFFERT;ALBERT * SCHILLING
分类号
G01B11/02;G01N21/59;G02B21/00;G02B21/24
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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