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发明名称
WAFER ORIENTER
摘要
申请公布号
EP0246117(A3)
申请公布日期
1989.09.27
申请号
EP19870304411
申请日期
1987.05.18
申请人
VARIAN ASSOCIATES, INC.
发明人
BALLOU, JON M.;COREY, PHILIP D.
分类号
G05D3/00;H01L21/677;H01L21/68;H01L21/683;(IPC1-7):H01J37/20
主分类号
G05D3/00
代理机构
代理人
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