| 摘要 |
PURPOSE:To contrive the reduction of labor hour in a vacuum pump extended in its bearing life by placing a belleville spring in a spring support, retaining seat and a cover to be used serving as the one part setting a pre-load, in case of the vertical turbo vacuum pump used for etching a semiconductor. CONSTITUTION:A vertical turbo vacuum pump comprises a rotor 1 rotating at a high speed and a casing 5. A spring support 15 plays a role of case, providing a retaining seat 16, belleville spring 17 and a spacer 18 so as to be built inside. While the retaining seat 16 is lifted to the upper by the belleville spring 17, pressing a bottom bearing 6 to the upper from the bottom. Force, applied to the bottom bearing 6 by the belleville spring 17, serves as the pre-load. In this way, the vacuum pump extends its bearing life while contriving the reduction of labor hour. |
