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发明名称
ION PLATING APPARATUS FOR MAS VAPOR DEPOSITION BY HCD METHOD
摘要
申请公布号
JPH01240646(A)
申请公布日期
1989.09.26
申请号
JP19880063707
申请日期
1988.03.18
申请人
KAWASAKI STEEL CORP;ULVAC CORP
发明人
IGUCHI MASAO
分类号
C23C14/32
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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