发明名称 Method for resistor trimming by metal migration
摘要 A method for trimming a diffused or implanted resistor located within an integrated circuit is disclosed. This technique for trimming a resistor requires the use of high current pulses and geometric shaped metal contacts. The current pulses react with the electropositive metal atoms in the thin film conductor and cause the metal atoms to migrate to another location, thus altering the value of the resistor by progressively decreasing the conductivity of the resistor.
申请公布号 US4870472(A) 申请公布日期 1989.09.26
申请号 US19860856257 申请日期 1986.04.28
申请人 MOTOROLA, INC. 发明人 VYNE, ROBERT L.
分类号 H01C17/26;H01L21/326;H01L29/8605 主分类号 H01C17/26
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