High resolution X-ray detector

摘要

An imaging X-ray sensor is composed of a linear array of microscopically small bars of polycrystalline ceramic scintillator material bonded at the bar ends to an integrated circuit photodetector array. The scintillator bars are the basic resolution elements of the detector and are less than 50 microns in width. Each bar produces a flash of light with intensity related to the X-ray flux penetrating the bar. A reflective coating covering five surfaces of the bars isolates each detector element and channels the light into the photodetector bonded to one end of the bar. A method of fabricating the detector array utilizes the machineability and good mechanical strength of scintillators such as rare earth oxides doped with rare earth activators.