发明名称 TURBO MOLECULAR PUMP
摘要 PURPOSE:To enhance reliability decreasing vibration of a pump during its operation by providing a pair of active type radial magnetic bearings supporting a rotary unit, motor arranged between these magnetic bearings and a dynamic damper arranged in the end part of a fixed shaft. CONSTITUTION:A fixed shaft 2 and a rotor 3, covering the fixed shaft 2, are arranged in a casing 1. An active radial magnetic bearing 5 supports the rotor 3. A motor 6 is arranged between these magnetic bearings 5. A dynamic damper 10 is arranged in an end part of the fixed shaft 2 and coated with a rotor cover 8. Thus enabling the rotor to be stably supported by the magnetic bearing in a contactless condition, reliability is enhanced by enabling vibration to be decreased during operation.
申请公布号 JPH01240791(A) 申请公布日期 1989.09.26
申请号 JP19880063403 申请日期 1988.03.18
申请人 EBARA RES CO LTD;EBARA CORP 发明人 WATANABE KAZUHIDE;INANAGA SEI
分类号 F04D19/04;F04D29/66;F16F7/108 主分类号 F04D19/04
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