METHOD OF DECIDING END OF ION CLEANING TREATMENT,申请号JP19880067641-传众专利搜索

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发明名称	METHOD OF DECIDING END OF ION CLEANING TREATMENT
摘要
申请公布号	JPH01240642(A)	申请公布日期	1989.09.26
申请号	JP19880067641	申请日期	1988.03.22
申请人	ISHIKAWAJIMA HARIMA HEAVY IND CO LTD	发明人	NEHASHI KIYOSHI;OKABE SHUICHI
分类号	C23C14/02;C23C14/54	主分类号	C23C14/02
代理机构		代理人
主权项
地址

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