WASHING DEVICE FOR SEMICONDUCTOR SUBSTRATE,申请号JP19880070551-传众专利搜索

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发明名称	WASHING DEVICE FOR SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH01241824(A)	申请公布日期	1989.09.26
申请号	JP19880070551	申请日期	1988.03.23
申请人	NEC CORP	发明人	SEO YUJI
分类号	H01L21/304;B08B3/04;F16K21/16	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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