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发明名称
RECRYSTALLIZATION
摘要
申请公布号
JPH01239837(A)
申请公布日期
1989.09.25
申请号
JP19880066932
申请日期
1988.03.19
申请人
NIPPON DENSO CO LTD
发明人
YOSHIHARA SHINJI;FUJII TETSUO;KUROYANAGI AKIRA;FUNAHASHI TOMOHIRO;AZEYANAGI SUSUMU;SAKAI MINEICHI
分类号
H01L21/20;H01L21/263
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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