APPARATUS FOR SEMICONDUCTOR MANUFACTURE

摘要

An efficient producing method for semiconducting materials, comprising continous process involving continuous deposition of ntype and p-type silicon thin film being partly or wholly non crystalline and its shaping process produces p-doped silicon thin film with high acceptor density and p-n or p-i-n members made from this. This method has the advantages of mass production of electricity regulating members involving p-n, p-i-n members or solar cell.