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发明名称
MANUFACTURE OF MOS TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01238172(A)
申请公布日期
1989.09.22
申请号
JP19880065423
申请日期
1988.03.18
申请人
FUJI ELECTRIC CO LTD
发明人
FUJIHIRA TATSUHIKO
分类号
H01L29/68;H01L21/331;H01L21/336;H01L29/10;H01L29/739;H01L29/78
主分类号
H01L29/68
代理机构
代理人
主权项
地址
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