| 摘要 |
PURPOSE:To decrease the output noises of a sensor which recognizes an alignment mark and to improve the efficiency of automatic registration by covering the inside of a region where the sensor scans exclusive of the film thickness to form the alignment mark with a film layer which is opaque to the sensor. CONSTITUTION:A transparent film layer 2 consists of a tantalum oxide, the alignment mark 3 of tantalum, the opaque film layer 4 of chromium and a transparent film layer 5 of ITO. The pattern of chromium is made to remain on the alignment mark 3 at the time of patterning the chromium which is the opaque film 4. Roughening of the transparent film layer 2 and the noises by the interference between the transparent film layers 2 and 5 are thereby decreased at the time of projecting laser light on the alignment mark and detecting the step part of the alignment mark by the reflected light thereof, etc. The sensor 7 having the good output is thus obtd. and the sufficient automatic alignment of the transparent film layer 5 is enabled. |
