MANUFACTURE OF TRANSPARENT CONDUCTIVE FILM

摘要

PURPOSE:To enable the haze rate of a tin oxide transparent conductive film to be easily controlled so as to be able to obtain a cheap transference electrode suitable for a solar battery by mixing tin tetrachloride and monobutyl tin trichloride as tin material. CONSTITUTION:In the process of that a compound including tin compounds and fluorine is brought into contact with a transparent body heated to a high temperature so as to form a fluorine dope tin oxide film (SnO2:F) by thermal decomposition oxidation reaction, tin tetrachloride and are used as the tin compounds so as to form the tin oxide film. Namely, in the process of forming the SnO2:F film on a base substance, the mixing proportion of two kinds of tin compounds is changed. With this arrangement, the haze rate of the SnO2:F film can be controlled by the degree of the change of the crystal grain diameter and the form of the SnO2:F film so that a transference electrode suitable for a solar battery can be obtained.