| 摘要 |
PURPOSE:To facilitate two-dimensional integration and realize a parallel arithmetic circuit stable in characteristics by a method wherein it is so designed that an optical output may be collected out of a substrate surface. CONSTITUTION:From top of an N-GaAs substrate 101, an N-AlGaAs layer 102, P-AlGaAs layer 103, GaAs active layer 104, N-AlGaAs layer 105, P-AlGaAs layer 106, and a P-AlGaAs cap layer 110 are formed in that order. The P- AlGaAs cap layer 110 is subjected to etching, an SiO2 layer 107 is deposited, an electrode 111 is built, the N-GaAs substrate 101 is subjected to etching, a dielectric multilayer reflection film mirror 108 is deposited, and then an electrode 109 is built. The electrode 111 is concurrently a reflection mirror and constitutes a resonator in cooperation with the dielectric multilayer reflection film mirror 108, and reflection rate control is so accomplished that light will be emitted from the dielectric multilayer reflection film mirror 108. This design facilitates two-dimensional integration and enables the construction of a parallel arithmetic circuit stable in characteristics. |
